Organic electroluminescent display apparatus and method for producing same

ABSTRACT

An organic EL display device ( 100 ) includes an element substrate including a substrate, a plurality of organic EL elements supported by the substrate and respectively located in the plurality of pixels, and a bank layer ( 48 ) defining each of the plurality of pixels; and a thin film encapsulation structure ( 10 ) covering the plurality of pixels. The bank layer has an inclining surface enclosing each of the plurality of pixels. The thin film encapsulation structure includes a first inorganic barrier layer ( 12 ), an organic barrier layer ( 14 ) including a plurality of solid portions in contact with a top surface of the first inorganic barrier layer and distributed discretely, and a second inorganic barrier layer ( 16 ) in contact with the top surface of the first inorganic barrier layer and top surfaces of the plurality of solid portions of the organic barrier layer. The plurality of solid portions include pixel periphery solid portions ( 14   a ) each extending, on the first inorganic barrier layer, from a portion on the inclining surface to a peripheral area in the corresponding pixel of the plurality of pixels, the pixel periphery solid portions each extending along the entirety of a circumference of the pixel. A refractive index n0 of the organic barrier layer is smaller than a refractive index n1 of the second inorganic barrier layer, and the top surfaces of the pixel periphery solid portions each have an inclination angle θa larger than, or equal to, 20 degrees.

TECHNICAL FIELD

The present invention relates to an organic EL display device and amethod for producing the same.

BACKGROUND ART

Organic EL (Electro-Luminescence) display devices start being put intopractical use. One feature of an organic EL display device is beingflexible. An organic EL display device includes, in each of pixels, atleast one organic EL element (Organic Light Emitting Diode: OLED) and atleast one TFT (Thin Film Transistor) controlling an electric current tobe supplied to each of the at least one OLED. Hereinafter, an organic ELdisplay device will be referred to as an “OLED display device”. Such anOLED display device including a switching element such as a TFT or thelike for each of OLEDs is called an “active matrix OLED display device”.A substrate including the TFTs and the OLEDs will be referred to as an“element substrate”.

An OLED (especially, an organic light emitting layer and a cathodeelectrode material) is easily influenced by moisture to be deterioratedand to cause display unevenness. One technology developed in order toprovide an encapsulation structure that protects the OLED againstmoisture while not spoiling the flexibility of the OLED display deviceis a thin film encapsulation (TFE) technology. According to the thinfilm encapsulation technology, an inorganic barrier layer and an organicbarrier layer are stacked alternately to provide a sufficient level ofbarrier property against water vapor with these thin films. From thepoint of view of the moisture-resistance reliability of the OLED displaydevice, such a thin film encapsulation structure is typically requiredto have a WVTR (Water Vapor Transmission Rate) lower than, or equal to,1×10⁻⁴ g/m²/day.

A thin film encapsulation structure used in OLED display devicescommercially available currently includes an organic barrier layer(polymer barrier layer) having a thickness of about 5 μm to about 20 μm.Such a relatively thick organic barrier layer also has a role offlattening a surface of the element substrate. However, such a thickorganic barrier layer involves a problem that the bendability of theOLED display device is limited.

Patent Document No. 1 discloses a thin film encapsulation structureincluding a first inorganic material layer, a first resin member and asecond inorganic material layer provided on the element substrate inthis order, with the first inorganic material layer being closest to theelement substrate. In this thin film encapsulation structure, the firstresin member is present locally, more specifically, around a protrudingportion of the first inorganic material layer (first Inorganic materiallayer covering a protruding portion). According to Patent Document No.2, the first resin member is present locally, more specifically, aroundthe protruding portion, which may not be sufficiently covered with thefirst inorganic material layer. With such a structure, entrance ofmoisture or oxygen via the non-covered portion is suppressed. Inaddition, the first resin member acts as an underlying layer for thesecond inorganic material layer. Therefore, the second inorganicmaterial layer is properly formed and properly covers a side surface ofthe first inorganic material layer with an expected thickness. The firstresin member is formed as follows. An organic material heated andvaporized to be mist-like is supplied onto an element substratemaintained at a temperature lower than, or equal to, room temperature.The organic material is condensed and put into liquid drops on thesubstrate. The organic material in liquid drops moves on the substrateby a capillary action or a surface tension to be present locally, morespecifically, at a border between a side surface of the protrudingportion of the first inorganic material layer and a surface of thesubstrate. Then, the organic material is cured to form the first resinmember at the border. Patent Document No. 2 also discloses an OLEDdisplay device including a similar thin film encapsulation structure.

The thin film encapsulation structure, described in each of PatentDocuments Nos. 1 and 2, including an organic barrier layer formed of aresin member that is present locally does not include a thick organicbarrier layer, and therefore, is considered to improve the bendabilityof the OLED display device.

Patent Document No. 3 discloses an OLED display device as describedbelow. A bank layer is formed at the border between pixels. A sidesurface of the bank layer includes a steeply inclining cliff portion,having an inclination angle larger than, or equal to, 90 degrees, alongmost of a circumference of each of the pixels, and also includes aslowly inclining portion, having an inclination angle smaller than 90degrees, along a part of the circumference of each of the pixels. Withsuch a structure, a flattening layer (corresponding to an organicbarrier layer in this specification) included in a thin filmencapsulation structure formed on the bank layer is suppressed frombeing delaminated. On the slowly inclining portion shown in FIG. 5 ofPatent Document No. 3, the flattening layer has an inclination angle ofabout 12 degrees. In a conventional thin film encapsulation structureshown in FIG. 12 of Patent Document No. 3, a flattening layer has aninclination angle of about 10 degrees.

CITATION LIST Patent Literature

Patent Document No. 1: WO2014/196137

Patent Document No. 2: Japanese Laid-open Patent Publication No.2016-39120

Patent Document No. 3: Japanese Laid-Open Patent Publication No.2015-50022

SUMMARY OF INVENTION Technical Problem

The studies made by the present inventor have found that the frontluminance and the directivity of an organic SL display device areinfluenced by the presence of an organic barrier layer (flattening layerin Patent Document No. 3).

The present invention has an object of providing an organic EL displaydevice having an improved front luminance and an improved directivity,and a method for producing the same.

Solution to Problem

An organic EL display device according to an embodiment of the presentinvention is an organic EL display device including a plurality ofpixels. The organic EL display device comprises an element substrateincluding a substrate, a plurality of organic EL elements supported bythe substrate and respectively located in the plurality of pixels, and abank layer defining each of the plurality of pixels; and a thin filmencapsulation structure covering the plurality of pixels. The bank layerhas an inclining surface enclosing each of the plurality of pixels. Thethin film encapsulation structure includes a first inorganic barrierlayer, an organic barrier layer including a plurality of solid portionsin contact with a top surface of the first inorganic barrier layer anddistributed discretely, and a second inorganic barrier layer in contactwith the top surface of the first inorganic barrier layer and topsurfaces of the plurality of solid portions of the organic barrierlayer. The plurality of solid portions include pixel periphery solidportions each extending, on the first inorganic barrier layer, from aportion on the inclining surface to a peripheral area in a correspondingpixel of the plurality of pixels, the pixel periphery solid portionseach extending along the entirety of a circumference of the pixel. Arefractive index n0 of the organic barrier layer is smaller than arefractive index n1 of the second inorganic barrier layer, and the topsurfaces of the pixel periphery solid portions each have an inclinationangle θa larger than, or equal to, 20 degrees. It is preferred that theinclination angle θa of each of the top surfaces of the pixel peripherysolid portions is larger than, or equal to, 30 degrees. The inclinationangle θa is substantially the same along the entirety of thecircumference of the pixel.

In an embodiment, the inclination angle θa of each of the top surfacesof the pixel periphery solid portions is smaller than, or equal to, 40degrees.

In an embodiment, the inclining surface of the bank layer has aninclination angle θb of 20 degrees or larger and 60 degrees or smaller.

In an embodiment, the refractive index n1 of the second inorganicbarrier layer and the refractive index n0 of the organic barrier layerhave a difference (Δn1=n1−n0) that is larger than, or equal to, 0.25.

In an embodiment, the refractive index n1 of the second inorganicbarrier layer is 1.75 or larger and 1.90 or smaller. It is preferredthat the refractive index n1 of the second inorganic barrier layer is1-80 or larger.

In an embodiment, a refractive index of the first inorganic barrierlayer is equal to the refractive index n1 of the second inorganicbarrier layer. It is preferred that the first inorganic barrier layerand the second inorganic barrier layer are each a silicon nitride film(SiN film).

In an embodiment, the pixel periphery solid portions each have arecessed surface. The pixel periphery solid portions having such astructure are formed by use of a resin having a high adhesiveness(wettability) to the bank layer.

It is preferred that the organic barrier layer is formed of a colorlessand transparent photocurable resin (e.g., acrylic resin).

A method for producing an organic EL display device according to anembodiment of the present invention is a method for producing theorganic EL display device of any of the above. The step of forming thethin film encapsulation structure includes the steps of preparing theelement substrate having the first inorganic barrier layer formedthereon in a chamber; supplying a vapor-like or mist-like photocurableresin into the chamber; condensing the photocurable resin on the firstinorganic barrier layer to form a liquid film; irradiating the liquidfilm of the photocurable resin with light to form a photocurable resinlayer; and partially ashing the photocurable resin layer to form theorganic barrier layer. The viscosity and/or the wettability to theinclining surface, for example, of the photocurable resin are controlledsuch that a liquid film is formed on the inclining surface of the banklayer. The surface of the inclining surface may be modified in order toadjust the wettability or the like of the photocurable resin.

A method for producing an organic EL display device according to anembodiment of the present invention is a method for producing theorganic EL display device of any of the above. The step of forming theorganic barrier layer is performed by spraying, spin-coating,slit-coating, screen printing or inkjet printing. The method may furtherinclude the step of ashing. The organic barrier layer may be formed of aphotosensitive resin, and mask exposure may be performed. The pixelperiphery solid portions may be formed, and also an inorganic barrierlayer joint portion, where the first inorganic barrier layer and thesecond inorganic barrier layer are in direct contact with each other,may also be formed, by the mask exposure.

Advantageous Effects of Invention

An embodiment of the present invention provides an organic EL displaydevice having an Improved front luminance and an improved directivity,and a method for producing the same.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1(a) is a schematic partial cross-sectional view of an activeregion of an OLED display device 100 according to an embodiment of thepresent invention, and FIG. 1(b) is a partial cross-sectional view of aTFE structure 10 formed on an OLED 3.

FIG. 2 is a plan view schematically showing a structure of the OLEDdisplay device 100 according to embodiment 1 of the present invention.

FIG. 3(a) through FIG. 3(c) are each a schematic cross-sectional view ofthe OLED display device 100; FIG. 3(a) is a cross-sectional view takenalong line 3A-3A′ in FIG. 2, FIG. 3(b) is a cross-sectional view takenalong line 3B-3B′ in FIG. 2, and FIG. 3(c) Is a cross-sectional viewtaken along line 3C-3C in FIG. 2.

FIG. 4(a) is an enlarged view of a portion including a particle P shownin FIG. 3(a), FIG. 4(b) is a schematic plan view showing the sizerelationship among the particle P, a first inorganic barrier layer (SiNlayer) covering the particle P, and an organic barrier layer, and FIG.4(e) is a schematic cross-sectional view of the first inorganic barrierlayer covering the particle P.

FIG. 5 is a plan view schematically showing a bank layer 48 included inthe OLED display device 100.

FIG. 6 provides cross-sectional views schematically showing a pixel andthe bank layer 48 included in the OLED display device 100; FIG. 6(a) isa cross-sectional view taken along line 6A-6A′ in FIG. 5, and FIG. 6(b)is a cross-sectional view taken along line 6B-6B′ in FIG. 5.

FIG. 7 is a schematic cross-sectional view provided to describefunctions and effects of a pixel periphery solid portion 14 a of the TFEstructure 10 included in the OLED display device 100.

DESCRIPTION OF EMBODIMENTS

Hereinafter, an OLED display device and a method for producing the sameaccording to an embodiment of the present invention will be describedwith reference to the drawings. The embodiments of the present inventionare not limited to the embodiments described below as an example. Forexample, an organic EL display device according to an embodiment of thepresent Invention nay include, for example, a glass substrate instead ofa flexible substrate.

First, with reference to FIG. 1(a) and FIG. 1(b), a basic structure ofan OLED display device 100 according to an embodiment of the presentinvention will be described. FIG. 1 (a) is a schematic partialcross-sectional view of an active region of the OLED display device 100according to an embodiment of the present invention. FIG. 1(b) is apartial cross-sectional view of a TFE structure 10 formed on an OLED 3.

The OLED display device 100 includes a plurality of pixels, and each ofthe pixels includes at least one organic EL element (OLED). Herein, astructure corresponding to one OLED will be described for the sake ofsimplicity.

As shown in FIG. 1(a), the OLED display device 100 includes a flexiblesubstrate (hereinafter, may be referred to simply as a “substrate”) 1, acircuit (back plane) 2 formed on the substrate 1 and including a TFT,the OLED 3 formed on the circuit 2, and the TFE structure 10 formed onthe OLED 3. The OLED 3 is, for example, of a top emission type. Anuppermost portion of the OLED 3 is, for example, an upper electrode or acap layer (refractive index adjusting layer). An optional polarizingplate 4 is located on the TFE structure 10.

The substrate 1 is, for example, a polyimide film having a thickness of15 μm. The circuit 2 including the TFE has a thickness of, for example,4 μm. The OLED 3 has a thickness of, for example, 1 μm. The TFEstructure 10 has a thickness that is, for example, less than, or equalto, 1.5 μm.

FIG. 1(b) is a partial cross-sectional view of the TFE structure 10formed on the OLED 3. The TFE structure 10 includes a first inorganicbarrier layer (e.g., SiN layer; 12, an organic barrier layer (e.g.,acrylic resin layer) 14, and a second inorganic barrier layer (e.g., SiNlayer) 16. The first inorganic barrier layer 12 is formed immediately onthe OLED 3. The organic barrier layer 14 includes a plurality of solidportions that are in contact with a top surface of the first inorganicbarrier layer 12 and are distributed discretely. The second inorganicbarrier layer 16 is in contact with the top surface of the firstinorganic barrier layer 12 and top surfaces of the plurality of solidportions of the organic barrier layer 14. The organic barrier layer 14is transparent (having a transmittance higher than, or equal to, 95% forvisible light when having a thickness of 1 μm.

The first inorganic barrier layer 12 and the second inorganic barrierlayer 16 are each, for example, an SiN layer (e.g., Si₃N₄ layer) havinga thickness of, for example, 400 nm. The first inorganic barrier layer12 and the second inorganic barrier layer 16 each have a thickness of200 nm or greater and 1000 nm or less independently. The thickness ofthe TFE structure 10 is preferably 400 nm or greater and less than 2 μm,and more preferably 400 nm or greater and less than 1.5 μm. Thethickness of the organic barrier layer 14, which depends on the size ofthe protruding portion of the surface of the first inorganic barrierlayer 12 or the size of the particle, may be 1 μm at the maximum. Thethickness of the organic barrier layer 14 is typically 200 nm or greaterand 500 nm or less.

The TFE structure 10 is formed so as to protect an active region (seethe active region R1 in FIG. 2) of the OLED display device 100. Asdescribed above, the TFE structure 10 includes, in at least the activeregion, the first inorganic barrier layer 12, the organic barrier layer14 and the second inorganic barrier layer 16 in this order, with thefirst inorganic barrier layer 12 being closest to the OLED 3. Theorganic barrier layer 14 is not present as a film covering the entiretyof the active region, but has openings. Portions of the organic barrierlayer 14 where an organic film is actually present, namely, portionsexcept for the openings, will be referred to as “solid portions”. The“openings” (may also referred to as “non-solid portions”) do not need tobe enclosed by the solid portions and may include a cutout portion andthe like. In the openings, the first inorganic barrier layer 12 and thesecond inorganic barrier layer 16 are in direct contact with each other.The openings of the organic barrier layer 14 include at least an openingformed so as to enclose the active region, and the active region isfully enclosed by the portion in which the first inorganic barrier layer12 and the second Inorganic barrier layer 16 are in direct contact witheach other (hereinafter, such a portion will be referred to as an“inorganic barrier layer joint portion”).

With reference to FIG. 2 through FIG. 7, a structure of, and a methodfor producing, an OLED display device according to an embodiment of thepresent invention will be described.

FIG. 2 is a schematic plan view of the OLED display device 100 accordingto an embodiment of the present invention.

The OLED display device 100 includes the flexible substrate 1, thecircuit (back plane) 2 formed on the substrate 1, a plurality of theOLEDs 3 formed or, the circuit 2, and the TFE structure 10 formed on theOLEDs 3. A layer including the plurality of OLEDs 3 may be referred toas an “OLED layer 3”. The circuit 2 and the OLED layer 3 may share apart of components. The optional polarizing plate (see reference numeral4 in FIG. 1) may further be located on the TFE structure 10. Inaddition, for example, a layer having a touch panel function may belocated between the TFE structure 10 and the polarizing plate. Namely,the OLED display device 100 may be altered to a display device includingan on-cell type touch panel.

The circuit 2 includes a plurality of TFTs (not shown), and a pluralityof gate bus lines (not shown) and a plurality of source bus lines (notshown) each connected with either one of the plurality of TFTs (notshown). The circuit 2 may be a known circuit that drives the pluralityof OLEDs 3. The plurality of OLEDs 3 are each connected with either oneof the plurality of TFTs included in the circuit 2. The OLEDs 3 may beknown OLEDs.

The OLED display device 100 further includes a plurality of terminals 38located in a peripheral region R2 outer to the active region R1 (regionenclosed by the dashed line in FIG. 2), where the plurality of OLEDs 3are located, and also includes a plurality of lead wires 30 connectingeach of the plurality of terminals 36 and either one of the plurality ofgate bus lines or either one of the plurality of source bus lines toeach other. The TFE structure 10 is formed on the plurality of OLEDs 3and on a portion of the plurality of lead wires 30 that is close to theactive region R1. Namely, the TFE structure 10 covers the entirety ofthe active region R1 and is also selectively formed on the portion ofthe plurality of lead wires 30 that is close to the active region R1.Neither a portion of the plurality of lead wires 30 that are closer tothe terminals 38, nor the terminals 38, is covered with the TFEstructure 10.

Hereinafter, an example in which the lead wires 30 and the terminals 38are integrally formed in the same conductive layer will be described.Alternatively, the lead wires 30 and the terminals 38 may be formed indifferent conductive layers (encompassing stack structures).

Now, with reference to FIG. 3(a) through FIG. 3(c), the TFE structure 10of the OLED display device 100 will be described. FIG. 3(a) is across-sectional view taken along line 3A-3A′ in FIG. 2. FIG. 3(b) is across-sectional view taken along line 3B-3B′ in FIG. 2. FIG. 3(c) is across-sectional view taken along line 3C-3C in FIG. 2.

As shown in FIG. 3(a) and FIG. 3(b), the TFE structure 10 includes thefirst inorganic barrier layer 12 formed on the OLED 3, the organicbarrier layer 14, and the second inorganic Carrier layer 16 in contactwith the first inorganic barrier layer 12 and the organic barrier layer14. The first inorganic barrier layer 12 and the second inorganicbarrier layer 16 are each, for example, an SiN layer, and areselectively formed in a predetermined region 30 as to cover the activeregion R1 by plasma CVD by use of a mask. In general, a surface of alayer formed by a thin film deposition method (e.g., CVD, sputtering,vacuum vapor deposition) reflects a stepped portion in an underlyinglayer. The organic barrier layer (solid portion) 14 is formed onlyaround the protruding portion of the surface of the first inorganicbarrier layer 12.

FIG. 3(a) is a cross-sectional view taken along line 3A-3A′ in FIG. 2,and shows a portion including a particle P. The particle P is amicroscopic dust particle generated during the production of the OLEDdisplay device, and is, for example, a microscopic piece of brokenglass, a metal particle or an organic particle. Such a particle isespecially easily generated in the case where mask vapor deposition isused.

As shown in FIG. 3(a), the organic barrier layer (solid portion) 14includes a portion 14 b formed around the particle P. A reason for thisis that an acrylic monomer supplied after the first inorganic barrierlayer 12 is formed is condensed and present locally, namely, around asurface of a first inorganic barrier layer 12 a on the particle P (thesurface has a tapering angle larger than 90 degrees). The organicbarrier layer 14 includes the opening (non-solid portion) on a flatportion of the first inorganic barrier layer 12.

Now, with reference to FIG. 4(a) through FIG. 4(c), a structure of theportion including the particle P will be described. FIG. 4(a) is anenlarged view of the portion including the particle P shown in FIG.3(a). FIG. 4(b) is a schematic plan view showing the size relationshipamong the particle P, the first inorganic barrier layer (SiN layer) 12covering the particle P and the organic barrier layer 14. FIG. 4(c) is aschematic cross-sectional view of the first inorganic barrier layercovering the particle P.

In the case where the particle P (having a diameter that is, forexample, longer than, or equal to, 1 μm) is present, a crack (defect) 12c may be formed in the first inorganic barrier layer as shown in FIG.4(c). As described below, this is considered to be caused by impingementof the SiN layer 12 a growing from a surface of the particle P and anSiN layer 12 b growing from a flat portion of a surface of the OLED 3.In the case where such a crack 12 c is present, the level of barrierproperty of the TFE structure 10 is decreased.

In the TFE structure 10 of the OLED display device 100, as shown in FIG.4(a), the organic barrier layer 14 is formed to fill the crack 12 c ofthe first inorganic barrier layer 12, and a surface of the organicbarrier layer 14 connects a surface of the first inorganic barrier layer12 a on the particle P and a surface of the first inorganic barrierlayer 12 b on the flat portion of the OLED 3 to each other continuouslyand smoothly. The organic barrier layer 14, which is formed by curing aphotocurable resin in a liquid state as described below, has a recessedsurface by a surface tension. In this state, the photocurable resinexhibits a high level of wettability to the first inorganic barrierlayer 12. If the level of wettability of the photocurable resin to thefirst inorganic barrier layer 12 is low, the surface of the organicbarrier layer 14 may protrude. The organic barrier layer 14 may also beformed with a small thickness on the first inorganic barrier layer 12 aon the particle P.

The organic barrier layer (solid portion) 14 having the recessed surfaceconnects the surface of the first inorganic barrier layer 12 a on theparticle P and the surface of the first inorganic barrier layer 12 b onthe flat portion to each other continuously and smoothly. Therefore, thesecond inorganic barrier Layer 16 formed thereon is a fine film with nodefect. As can be seen, even if the particle P is present, the organicbarrier layer 14 keeps high the level of barrier property of the TFEstructure 10.

As shown in FIG. 4(b), the organic barrier layer 14 (solid portion) isformed in a ring shape around the particle P. Where the particle P has adiameter (equivalent circle diameter) of about 1 μm as seen in adirection normal to the surface of the OLED 3, the ring-shaped solidportion has a diameter Do (equivalent circle diameter) that is, forexample, longer than, or equal to, 2 μm.

In this example, the organic barrier layer 14 is formed only in adiscontinuous portion in the first inorganic barrier layer 12 formed onthe particle P, and the particle P is already-present before the firstinorganic barrier layer 12 is formed on the OLED 3. The particle P maybe present on the first inorganic barrier layer 12. In this case, theorganic barrier layer 14 is formed only at the border, namely, in adiscontinuous portion, between the first inorganic barrier layer 12 andthe particle P on the first inorganic barrier layer 12, and thusmaintains the barrier property of the TFE structure 10 like in theabove-described case. The organic barrier layer 14 may also be formedwith a small thickness on the surface of the first inorganic barrierlayer 12 a on the particle P, or on the surface of the particle P. Inthis specification, the expression that “the organic barrier layer 14 ispresent around the particle P” encompasses all these forms.

The organic barrier layer (solid portion) 14 is not limited to beingformed as in the example of FIG. 3(a), and may be formed only around theprotruding portion of the surface of the first inorganic barrier layer12 for substantially the same reason. Examples of the other regionswhere the organic barrier layer (solid portion) 14 may be formed will bedescribed below.

Now, with reference to FIG. 3(b), a structure of the TFE structure 10 onthe lead wires 30 will be described. FIG. 3(b) is a cross-sectional viewtaken along line 3B-3B′ in FIG. 2; more specifically, is across-sectional view of portions 32, of the lead wires 30, close to theactive region R1.

As shown in FIG. 3(b), the organic barrier layer (solid portions) 14includes portions 14 c formed around the protruding portions of thesurface of the first inorganic barrier layer 12. The protruding portionsreflect the cress-sectional shape of the portions 32 of the lead wires30.

The lead wires 30 are patterned by the same step as that of, forexample, the gate bus lines or the source bus lines. Thus, in thisexample, the gate bus lines and the source bus lines formed in theactive region R1 also have the same cross-sectional structure as that ofthe portion 32, of each of the lead wires 30, close to the active regionR1 shown in FIG. 3(b). It should be noted that typically, a flatteninglayer is formed on the gate bus lines and the source bus lines formed inthe active region R1, and thus no stepped portion is formed at thesurface of the first inorganic barrier layer 12 on the gate bus linesand the source bus lines.

The portion 32 of the lead wire 30 may have, for example, a forwardtapering side surface portion (inclining side surface portion) having atapering angle smaller than 90 degrees. In the case where the lead wire30 includes the forward tapering side surface portion, formation ofdefects in the first inorganic barrier layer 12 and the second inorganicbarrier layer 16 formed on the lead wire 30 is prevented. Namely, themoisture-resistance reliability of the TFE structure 10 is improved. Thetapering angle of the forward tapering side surface portion ispreferably smaller than, or equal to, 70 degrees.

The active region R1 of the OLED display device 100 is substantiallycovered with the inorganic barrier layer joint portion, in which thefirst inorganic barrier layer 12 and the second inorganic barrier layer16 are in direct contact with each other, except for the regions wherethe organic barrier layer 14 is selectively formed. Therefore, it doesnot occur that the organic barrier layer 14 acts as a moisture entranceroute to allow the moisture to reach the active region R1 of the OLEDdisplay device.

The OLED display device 100 according to an embodiment of the presentinvention is preferably usable for, for example, medium- to small-sizedhigh-definition smartphones and tablet terminals. In a medium- tosmall-sized (e.g., 5.7-inch) high-definition (e.g., 500 ppi) OLEDdisplay device, it is preferred that lines (encompassing the gate buslines and the source bus lines) in the active region R1 have across-sectional shape, taken in a direction parallel to a line widthdirection, close to a rectangle (side surfaces of the lines have atapering angle of about 90 degrees) in order to allow the lines to havea sufficiently low resistance with a limited line width. In order toform the lines having a low resistance, the tapering angle of theforward tapering side surface portion TSF may be larger than 70 degreesand smaller than 90 degrees, or the tapering angle may be about 90degrees in the entire length of the lines with no forward tapering sidesurface portion TSF being provided.

Now, FIG. 3(c) will be referred to. FIG. 3(c) is a cross-sectional viewof a region where the TFE structure 10 is not formed. In this region, aterminal portion 38 has the same cross-sectional structure as that ofportions 36 of the lead wires 30 shown in FIG. 3(c). The portions 36 ofthe lead wires 30 shown in FIG. 3(e) may have a tapering angle of, forexample, about 90 degrees.

Now, with reference to FIG. 5 and FIG. 6, the organic barrier layer 14formed around a bank structure BS will be described. The organic barrierlayer (solid portion) 14 is also formed around a protruding portion ofthe surface of a portion, of the first inorganic barrier layer 12, thatis used to form the bank structure BS. FIG. 5 is a plan viewschematically showing the plurality of pixels and a bank layer 48included in the OLED display device 100. FIG. 6(a) is a cross-sectionalview taken along line 6A-6A′ in FIG. 5, and FIG. 6(b) is across-sectional view taken along line 6B-6B′ in FIG. 5.

As shown in FIG. 6(a), the OLED display device 100 further includes thebank structure BS defining each of the plurality of pixels. The bankstructure BS has an inclining surface enclosing each of the plurality ofpixels. The plurality of solid portions of the organic barrier layer 14include pixel periphery solid portions 14 a each extending, on the firstinorganic barrier layer 12, from an inclining surface S12 thereof to aperipheral area in a corresponding pixel of the plurality of pixels.

As shown in FIG. 6(a), the bank structure BS includes the bank layer 48formed of an insulating material (the bank layer may be referred to alsoas a “PDL (Pixel Defining Layer)”). The bank layer 48 is formed betweena lower electrode 42 and an organic layer 44 of the OLED 3. As shown inFIG. 6(a), the OLED 3 includes the lower electrode 42, the organic layer44 formed on the lower electrode 42, and an upper electrode 46 formed onthe organic layer 44. In this example, the lower electrode 42 and theupper electrode 46 respectively act as an anode and a cathode of theOLED 3. The upper electrode 46 is a common electrode formed for theentirety of the pixels in the active region. By contrast. the lowerelectrode (pixel electrode) 42 is formed for each of the pixels. In thestructure in which the bank layer 48 is present between the lowerelectrode 42 and the organic layer 44, no holes are injected from thelower electrode 42 into the organic layer 44. Therefore, the regionwhere the bank layer 48 is present does not act as a pixel Pix. Thus,the bank layer 48 defines an outer perimeter of the pixel Pix.

As shown in FIG. 5, each pixel Pix is defined by an opening in the banklayer 48. The bank layer 48 is formed to be, for example,lattice-shaped. A side surface of the opening of the bank layer 48 hasan inclining surface including the forward tapering side surface portionTSF. The inclining surface of the bank layer 48 encloses each pixel. Thebank layer 48 is formed of, for example, a photosensitive resin (e.g.,polyimide or acrylic resin). The bank layer 48 has a thickness of, forexample, 1 μm to 2 μm. The inclining surface of the bank layer 48 isinclined at an inclination angle θb that is smaller than, or equal to,60 degrees. If the inclination angle θb of the inclining surface of thebank layer 48 is larger than 60 degrees, a defect may be caused inlayers located on the bank layer 48. The layers located on the banklayer 48 (including, for example, the organic layer 44, the upperelectrode 46, the first inorganic barrier layer 12 and the secondinorganic barrier layer 16) may be included in the bank structure BS.The layers included in the bank structure BS may each have an incliningsurface enclosing each of the plurality of pixels. In the case whereeach of the layers formed on the bank layer 48 is thinner than the banklayer 48, the inclination angle of the inclining surface of the bankstructure BS is considered to be substantially equal to the inclinationangle θb of the inclining surface of the bank layer 48. The firstinorganic barrier layer 12 is included in the bank structure BS, and hasthe inclining surface 312 enclosing each of the plurality of pixels. Theorganic barrier layer (solid portion) 14 includes the pixel peripherysolid portion 14 a extending, on the first inorganic barrier layer 12from the inclining surface 312 thereof to a peripheral area in thepixel.

As shown in, for example, FIG. 6(a), in a central area of the pixel, theorganic barrier layer 14 is formed only in a discontinuous portionformed in the first inorganic barrier layer 12 by the particle P.Namely, as shown in FIG. 6(b), the organic barrier layer 14 is notpresent in a central area, of the pixel, where no particle P is present.The OLED display device with no particle P does not include the organicbarrier layer in the central area of the pixel. The particle P has asize (equivalent spherical diameter) of, typically, 0.3 μm or longer and5 μm or shorter. A board of G4.5 (730 mm×920 mm) may have, for example,several tens to about 100 particles. One OLED display device (activeregion) may have approximately several particles. Needless to say, thereare OLED display devices with no particle P. The organic barrier layer14 is formed of, for example, a cured photocurable resin. A portionwhere the photocurable resin is actually present is referred to as a“solid portion”. As described above, the organic barrier layer 14 (solidportion) is selectively formed only around a protruding portion of thesurface of the first inorganic barrier layer 12.

As shown in, for example, FIG. 6(a), in the case where there is aparticle P in the central area of the pixel, the organic barrier layer14 is formed in a discontinuous portion formed by the particle P. Asdescribed above with reference to FIG. 4(b), the organic barrier layer(solid portion) 14 is formed in a ring shape around the particle P.Where the particle P has a diameter (equivalent circle diameter) of, forexample, about 1 urn as seen in a direction normal to the surface of theOLED 3, the ring-shaped solid portion has a diameter D₀ (equivalentcircle diameter) that is, for example, longer than, or equal to, 2 μm.In the case of, for example, a 5.7-inch display device having 2560×1440pixels (about 500 ppi), the pixel pitch is 49 μm. The size of theparticle P and the size of the organic barrier layer (solid portion) 14formed around the particle P are sufficiently smaller than the pixelpitch. Therefore, a change in the transmittance caused by the barrierlayer 14 (solid portion) formed around the particle P does not have asignificant influence on the display.

With reference to FIG. 7, functions and effects of the pixel peripherysolid portion 14 a (organic barrier layer 14) of the TFE structure 10included in the OLED display device 100 will be described.

As described above, the OLED display device 100 includes the elementsubstrate including the plurality of organic EL elements respectivelylocated in the plurality of pixels and the bank layer 48 defining eachof the plurality of pixels, and also includes the TFE structure 10covering the plurality of pixels. The bank layer 48 has the incliningsurface enclosing each of the plurality of pixels. The TFE structure 10includes the first inorganic barrier layer 12, the organic barrier layer14 including the plurality of solid portions that are in contact withthe top surface of the first inorganic barrier layer 12 and aredistributed discretely, and the second inorganic barrier layer 16 incontact with the top surface of the first inorganic barrier layer 12 andthe top surfaces of the plurality of solid portions of the organicbarrier layer 14. The plurality of solid portions include the pixelperiphery solid portions 14 a each extending, on the first inorganicbarrier layer 12, from the inclining surface thereof to a peripheralarea in the corresponding pixel. The pixel periphery solid portions 14 aeach extend along the entirety of a circumference of the pixel. Arefractive index n0 of the organic barrier layer 14 is smaller than arefractive index n1 of the first inorganic barrier layer 12. Aninclination angle θa of a top surface of each of the pixel peripherysolid portions 14 a is larger than, or equal to, 20 degrees. It ispreferred that the inclination angle θa of the top surface is largerthan, or equal to, 30 degrees. It is preferred that the inclinationangle θa of the top surface is smaller than, or equal to, 40 degrees.The inclination angle θa is substantially the same along the entirety ofthe circumference of the pixel. The plurality of pixels each have thebank layer of substantially the same structure. In this specification,the expression “substantially the same” indicates that the numericalfigure is within the production tolerance, unless otherwise specified.

The TFE structure 10 of the OLED display device 100 includes the pixelperiphery solid portions 14 a described above-Therefore, the TFEstructure 10 has a higher front luminance and a higher directivity thanthose of a conventional TFE structure. Hereinafter, a reason thereforwill be described.

A light bean L represented by arrow L in FIG. 7 is now paid attentionto. Among light beams that are output from the organic layer 44, passthe TFE structure 10 and are output from the OLED display device 100,the light beam L represents a track of a light beam that isperpendicularly incident on a portion, of the pixel periphery solidportion 14 a, that is formed on a flat region Rpa in the pixel. Namely,the light beam L, output from the organic: layer 44 in a directionnormal to the display plane, passes the upper electrode 46 and the firstinorganic barrier layer 12 and is incident on the pixel periphery solidportion 14 a. An incidence angle θ1 of the light beam L on the pixelperiphery solid portion 14 a is 0 degrees. The light beam L, afterentering the pixel periphery solid portion 14 a, advances in a directionof θ2=0°. Then, the light beam L is incident on the top surface of thepixel periphery solid portion 14 a (the top surface has an inclinationangle of θa) at an angle of θ3, is output from the top surface of thepixel periphery solid portion 14 a at an angel of θ4, and is incident onthe second inorganic barrier layer 16.

The refractive index n0 of the organic barrier layer 14 is smaller thanthe refractive index n1 of the second inorganic barrier layer 16(n0<n1). The organic barrier layer 14 is formed of, for example, aphotocurable acrylic resin having a refractive index of 1.54, and thesecond inorganic barrier layer 16 is formed of, for example, siliconnitride (Si₃N₄) having a refractive index of 1.80 or larger and 1.90 orsmaller. Since the refractive index n0 of the organic barrier layer14<the refractive index n1 of the second inorganic barrier layer 16,θ3>θ4 based on Snell's law. Silicon nitride (Si₃N₄) having a refractiveindex of 1.80 or larger and 1.90 or smaller has a superb barrierproperty. It is preferred that the first inorganic barrier layer 12 isalso formed of silicon nitride (Si₃N₄) having a refractive index of 1.80or larger and 1.90 or smaller. As is well known, the refractive indexmay be controlled by the film formation conditions of the siliconnitride film.

Next, the light beam L is incident on an interface between the secondinorganic barrier layer 16 and the air at an angle of θ5, and is outputfrom the second inorganic barrier layer 16 at an angle of θ6. Therefractive index of the air is smaller than the refractive index n1 ofthe second inorganic barrier layer 16. Therefore, θ6>θ5 based on Snell'slaw. θ6* is the angle θ6 represented as an angle with respect to thedirection normal to the display plane. Namely, θ6* represents the polarangle of the light beam L, output from the OLED display device 100, withrespect to the direction normal to the display plane. Herein, a casewhere the top surface of the second inorganic barrier layer 16 is incontact with the air is described. Even in the case where the topsurface of the second inorganic barrier layer 16 is in contact with anorganic insulating layer and/or an inorganic; insulating layer (having arefractive index smaller than the refractive index n1 of the secondinorganic barrier layer 16), the light beam L behaves in substantiallythe same as manner as that described above.

An influence exerted on θ6* by presence/absence of the organic barrierlayer, namely, the pixel periphery solid portion 14 a was found, andTable 1 shows the results. Table 1 shows the cases where the inclinationangle θa of the top surface of the pixel periphery solid portion 14 a is10°, 20°, 30° and 40°. The numerical figures in the parenthesesregarding θ6* in Table 1 are each a value obtained by subtracting avalue of θ6* in the case where the organic barrier layer is absent froma value of θ6* in the case where the organic barrier layer is present.

In this example, the refractive index n0 of the organic barrier layerwas 1.54, and the refractive index n1 of the second inorganic barrierlayer 16 was 1.85. The structure in the case where the organic barrierlayer was absent were found by setting the refractive index n0 of theorganic barrier layer 14 to 1.85

TABLE 1 ORGANIC BARRIER LAYER n1 n0 θa (°) θ6* (°) ABSENT 1.85 1.85 10 8.7 PRESENT 1.85 1.54 10 5.5 (−3.2) ABSENT 1.85 1.85 20 19.3 PRESENT1.85 1.54 20 11.8 (−7.5) ABSENT 1.85 1.85 30 37.7 PRESENT 1.85 1.54 30 20.4 (−17.3) ABSENT 1.85 1.85 40 — PRESENT 1.85 1.54 40 41.8

As can be seen from Table 1, provision of the organic barrier layer 14decreases the values of θ6* Especially in the case where the inclinationangle θa of the top surface of the pixel periphery solid portion 14 a islarger than, or equal to, 20 degrees, there is a conspicuous tendencythat the value of θ6* is decreased. Namely, the front luminance and thedirectivity of the organic EL display device may be effectively improvedby setting the inclination angle θa of the top surface of the pixelperiphery solid portion 14 a to be larger than, or equal to, 20 degrees.This advantage is more significant in the case where the inclinationangle θa of the top surface of the pixel periphery solid portion 14 a islarger than, or equal to, 30 degrees. It should be noted that θa ispreferably smaller than, or equal to, 40 degrees. In the case where θaexceeds 40 degrees, the amount of the light beam output from the organicEL display device may be decreased. Table 1 does not show any numericalfigure in the case where the organic barrier layer is absent and θa is40 degrees. This indicates that the light beam L Is not output from thesecond inorganic barrier layer 16. Provision of the organic barrierlayer 14 may allow the light beam L to be output from the secondinorganic barrier layer 16 at θ6*=41.8° even when θa is 40 degrees.However, when θa exceeds 40 degrees, the light beam may not be outputfrom the second inorganic barrier layer 16. Needless to say, the upperlimit of θa depends on the values of the refractive index of the organicbarrier layer and the second inorganic barrier layer, and is found by acalculation made based on Snell's law as described above.

It is preferred that the refractive index n1 of the second inorganicbarrier layer 16 and the refractive index n0 of the organic barrierlayer 14 have a difference (Δn1=n1−n0) that is larger than, or equal to,0.25. As shown above as an example (Δn=1.85−1.54=0.31), it is furtherpreferred that Δn is larger than, or equal to, 0.3.

The inclination angle θa of the top surface of the pixel periphery solidportion 14 a is controlled by the inclination angle θb of the incliningsurface of the bank layer 48, the viscosity of the resin material usedto form the organic barrier layer 14, and the like. In order to controlthe inclination angle θa of the top surface of the pixel periphery solidportion 14 a to be 20 degrees or larger and AO degrees or smaller, it ispreferred that the inclination angle θb of the inclining surface of thebank layer 48 is 20 degrees or larger and 60 degrees or smaller. As longas the inclination angle θb of the inclining surface of the bank layer48 is in this range, it is easy to control the inclination angle θa ofthe top surface of the pixel periphery solid portion 14 a to be 20degrees or larger and 40 degrees or smaller by use of a photocurableresin (e.g., ultraviolet-curable acrylic resin) having a relatively lowviscosity. As long as the inclination angle θb of the inclining surfaceof the bank layer 48 is smaller than, or equal to, 60 degrees, there isno possibility that a layer (e.g., line or electrode) formed on the banklayer 48 is ruptured by the stepped portion.

As long as the inclination angle θa of the top surface of the pixelperiphery solid portion 14 a is larger than, or equal to, 20 degrees,the problem that the organic barrier layer 14 is delaminated asdescribed in Patent Document No. 3 is suppressed. In the case where aresin having a high adhesiveness (wettability) to the bank layer isused, the resultant pixel periphery solid portion 14 a has a recessedsurface. In other words, it is preferred to use such a resin material asto form the pixel periphery solid portion 14 a having a recessed surfaceto form the organic barrier layer 14.

It is preferred that the organic barrier layer 14 is formed of acolorless and transparent photocurable resin (e.g., ultraviolet-curableacrylic resin). A reason for this is that if the organic barrier layer14 absorbs visible light, the light utilization efficiency (luminance)is decreased.

It is preferred that the effect, provided by the pixel periphery solidportion 14 a, of improving the front luminance and the directivity isuniformly exhibited in the entirety of the circumference of the pixel.Therefore, as described above, the plurality of pixels each have thebank layer 48 and the pixel periphery solid portion 14 a ofsubstantially the sane structure in the entire circumference thereof. Ifthe structure of the bank layer 48 or the pixel periphery solid portion14 a is different in a part of the circumference of the pixel, theluminous intensity distribution is different. This may cause aphenomenon that, for example, the display is colored differently whenbeing viewed at a particular oblique viewing angle.

The organic barrier layer 14 may be formed by the method described in,for example, Patent Document No. 1 or 2. For example, a vapor-like ormist-like organic material (e.g., acrylic monomer) is supplied, in achamber, onto an element substrata maintained at a temperature lowerthan, or equal to, room temperature, and is condensed on the elementsubstrate. The organic material put into a liquid state is locatedlocally, more specifically, at the border between the side surface ofthe protruding portion and the flat portion of the first inorganicbarrier layer 12 by a capillary action or a surface tension of theorganic material. Then, the organic material is irradiated with, forexample, ultraviolet rays to form the solid portion of the organicbarrier layer (e.g., acrylic resin layer) 14 at the border, namely,around the protruding portion. The organic barrier layer 14 formed bythis method includes substantially no solid portion on the flat portion.Regarding the method for forming the organic barrier layer 14, thedisclosures of Patent Documents Nos. 1 and 2 are incorporated herein byreference. At this point, the viscosity, the wettability to theinclining surface and the like of the photocurable resin are controlledsuch that a liquid film is formed on the inclining surface of the ban'slayer. The surface of the inclining surface may be modified. For theformation of the organic barrier layer 14, the thickness of the resinlayer to be formed first (e.g., to lass than 100 nm) and/or ashingconditions (including time) may be adjusted.

The organic barrier layer 14 may be formed by, for example, spraying,spin-coating, slit-coating, screen printing or Inkjet printing. Themethod for forming the organic barrier layer 14 may further include astep of ashing. The organic barrier layer may be formed of aphotosensitive resin, and mask exposure may be performed. The pixelperiphery solid portion may be formed, and also the inorganic barrierlayer Joint portion, where the first inorganic barrier layer and thesecond inorganic barrier layer are in direct contact with each other,may also be formed, by the mask exposure.

As described above, silicon nitride (Si₃N₄) having a refractive index of1.80 or larger and 1.90 or smaller is preferably usable for the firstinorganic barrier layer and the second inorganic barrier layer.Alternatively, an SiON layer, an SiNO layer, an Al₂O₃ layer or the likehaving a refractive index n1 larger than, or equal to, 1.75 may be usedfor the first inorganic barrier layer and the second inorganic barrierlayer.

INDUSTRIAL APPLICABILITY

Embodiments of the present invention are applicable to an organic ELdisplay device, especially, a flexible organic EL display device, and amethod for producing the same.

REFERENCE SIGNS LIST

-   -   1 substrate (flexible substrate)    -   2 circuit    -   3 OLED layer    -   4 polarizing plate    -   10 TFE structure    -   12 first inorganic barrier layer (SiN layer)    -   14 organic barrier layer    -   14 a pixel periphery solid portion    -   16 second inorganic barrier layer (SiN layer)    -   30 lead wire    -   38 terminal portion    -   38 terminal    -   42 lower electrode    -   44 organic layer    -   46 upper electrode    -   48 bank layer    -   100 OLED display device    -   BS bank structure    -   P particle    -   Pix pixel    -   R1 active region    -   R2 peripheral region

1. An organic EL display device including a plurality of pixels,comprising: an element substrate including a substrate, a plurality oforganic EL elements supported by the substrate and respectively locatedin the plurality of pixels, and a bank layer defining each of theplurality of pixels; and a thin film encapsulation structure coveringthe plurality of pixels, wherein the bank layer has an inclining surfaceenclosing each of the plurality of pixels, wherein the thin filmencapsulation structure includes a first inorganic barrier layer, anorganic barrier layer including a plurality of solid portions in contactwith a top surface of the first inorganic barrier layer and distributeddiscretely, and a second inorganic barrier layer in contact with the topsurface of the first inorganic barrier layer and top surfaces of theplurality of solid portions of the organic barrier layer, wherein theplurality of solid portions include pixel periphery solid portions eachextending, on the first inorganic barrier layer, from a portion on theinclining surface to a peripheral area in a corresponding pixel of theplurality of pixels, the pixel periphery solid portions each extendingalong the entirety of a circumference of the pixel, and wherein arefractive index n0 of the organic barrier layer is smaller than arefractive index n1 of the second inorganic barrier layer, and the topsurfaces of the pixel periphery solid portions each have an inclinationangle θa larger than, or equal to, 20 degrees, and wherein a refractiveindex of the first inorganic barrier layer is equal to the refractiveindex n1 of the second inorganic barrier layer.
 2. The organic ELdisplay device of claim 1, wherein the inclination angle θa of each ofthe top surfaces of the pixel periphery solid portions is smaller than,or equal to, 40 degrees.
 3. The organic EL display device of claim 1,wherein the inclining surface of the bank layer has an inclination angleθb of 20 degrees or larger and 60 degrees or smaller.
 4. The organic ELdisplay device of claim 1, wherein the refractive index n1 of the secondinorganic barrier layer and the refractive index n0 of the organicbarrier layer have a difference (Δn1=n1−n0) that is larger than, orequal to, 0.25.
 5. The organic EL display device of claim 1, wherein therefractive index n1 of the second inorganic barrier layer is 1.75 orlarger and 1.90 or smaller.
 6. (canceled)
 7. The organic EL displaydevice of claim 1, wherein the pixel periphery solid portions each havea recessed surface.
 8. A method for producing the organic EL displaydevice, the organic EL display device including a plurality of pixels,comprising: an element substrate including a substrate, a plurality oforganic EL elements supported by the substrate and respectively locatedin the plurality of pixels, and a bank layer defining each of theplurality of pixels; and a thin film encapsulation structure coveringthe plurality of pixels, wherein the bank layer has an inclining surfaceenclosing each of the plurality of pixels, wherein the thin filmencapsulation structure includes a first inorganic barrier layer, anorganic barrier layer including a plurality of solid portions in contactwith a top surface of the first inorganic barrier layer and distributeddiscretely, and a second inorganic barrier layer in contact with the topsurface of the first inorganic barrier layer and top surfaces of theplurality of solid portions of the organic barrier layer, wherein theplurality of solid portions include pixel periphery solid portions eachextending, on the first inorganic barrier layer, from a portion on theinclining surface to a peripheral area in a corresponding pixel of theplurality of pixels, the pixel periphery solid portions each extendingalong the entirety of a circumference of the pixel, and wherein arefractive index n0 of the organic barrier layer is smaller than arefractive index n1 of the second inorganic barrier layer, and the topsurfaces of the pixel periphery solid portions each have an inclinationangle θa larger than, or equal to, 20 degrees, and wherein a refractiveindex of the first inorganic barrier layer is equal to the refractiveindex n1 of the second inorganic barrier layer, wherein the step offorming the thin film encapsulation structure includes the steps of:preparing the element substrate having the first inorganic barrier layerformed thereon in a chamber; supplying a vapor-like or mist-likephotocurable resin into the chamber; condensing the photocurable resinon the first inorganic barrier layer to form a liquid film; irradiatingthe liquid film of the photocurable resin with light to form aphotocurable resin layer; and partially ashing the photocurable resinlayer to form the organic barrier layer.
 9. (canceled)
 10. The method ofclaim 8, wherein the inclination angle θa of each of the top surfaces ofthe pixel periphery solid portions is smaller than, or equal to, 40degrees.
 11. The method of claim 8, wherein the inclining surface of thebank layer has an inclination angle θb of 20 degrees or larger and 60degrees or smaller.
 12. The method of claim 8, wherein the refractiveindex n1 of the second inorganic barrier layer and the refractive indexn0 of the organic barrier layer have a difference (Δn1=n1−n0) that islarger than, or equal to, 0.25.
 13. The method of claim 8, wherein therefractive index n1 of the second inorganic barrier layer is 1.75 orlarger and 1.90 or smaller.
 14. The method of claim 8, wherein arefractive index of the first inorganic barrier layer is equal to therefractive index n1 of the second inorganic barrier layer.
 15. Themethod of claim 8, wherein the pixel periphery solid portions each havea recessed surface.